Parts For Sale TEGAL FAW15-3.4K TEGAL FAW15-3.4K Request Quote Do not fill in this field Request for Quote First Name: * Last Name: * Email: * Confirm Email: * Company: Quantity: Message: Conditions:NewUsedRefurbishedNeeds RepairSecond Source (New)Second Source (Used) Part Details TEGAL FAW15-3.4K Manufacturer TEGAL Part Number FAW15-3.4K Description PWR SUP +/-5VDC 10A Status Available Approx. Qty 1 Pricing Submit RFQ to Get Prices Most Recent Supplier Data Condition Quantity Country New 1.0 US Other TEGAL Parts 58-073-001 39-853-005 40-467-001 40-140-001 RING, CERAMIC INSULATOR 42-362-001 47-101-002 39-894-001 29-464-001 SPR, TEGAL KIT CHMBR GRND OEM PN equiv: 29-464-001 40-295-003 FOCUS RING 52-047-002 40-304-001 ELECTRODE, INSULATOR LOWER 150 mm 150 mm 25 slot Aluminum wafer carrier.
