Parts For Sale TEGAL 99-114-001 TEGAL 99-114-001 Request Quote Do not fill in this field Request for Quote First Name: * Last Name: * Email: * Confirm Email: * Company: Quantity: Message: Conditions:NewUsedRefurbishedNeeds RepairSecond Source (New)Second Source (Used) Part Details TEGAL 99-114-001 Manufacturer TEGAL Part Number 99-114-001 Description PCB, MP MECHANISM CONTROLLER MMC-1 Status Available Approx. Qty 2 Pricing Submit RFQ to Get Prices Most Recent Supplier Data Condition Quantity Country New 2.0 US Other TEGAL Parts 150 mm 150 mm 25 slot Aluminum wafer carrier. 39-853-005 40-481-002 Insulator Ring 23-459-001 32-242-001 32-165-001 80-200-053 CLAMP,HOSE,WORM DR,2 1/4,SST 39-611-001 51-265-001 42-560-002