Parts For Sale TEGAL 99-114-001 TEGAL 99-114-001 Request Quote Do not fill in this field Request for Quote First Name: * Last Name: * Email: * Confirm Email: * Company: Quantity: Message: Conditions:NewUsedRefurbishedNeeds RepairSecond Source (New)Second Source (Used) Part Details TEGAL 99-114-001 Manufacturer TEGAL Part Number 99-114-001 Description PCB, MP MECHANISM CONTROLLER MMC-1 Status Available Approx. Qty 2 Pricing Submit RFQ to Get Prices Most Recent Supplier Data Condition Quantity Country New 2.0 US Other TEGAL Parts 80-650-053 ACTUATOR 40-467-001 40-140-001 RING, CERAMIC INSULATOR 42-362-001 47-101-002 39-894-001 41-387-001 52-047-002 40-790-001 FOCUS RING 40-576-003-C Ring Ceramic Focus Castellated 50-056-001 80-200-144 BSHG BALL 3/8B 5/8OD 7/8L STL
