Parts For Sale TEGAL 99-114-001 TEGAL 99-114-001 Request Quote Do not fill in this field Request for Quote First Name: * Last Name: * Email: * Confirm Email: * Company: Quantity: Message: Conditions:NewUsedRefurbishedNeeds RepairSecond Source (New)Second Source (Used) Part Details TEGAL 99-114-001 Manufacturer TEGAL Part Number 99-114-001 Description PCB, MP MECHANISM CONTROLLER MMC-1 Status Available Approx. Qty 2 Pricing Submit RFQ to Get Prices Most Recent Supplier Data Condition Quantity Country New 2.0 US Other TEGAL Parts 46-879-001 40-481-002 Insulator Ring 47-583-001 47-695-001 39-741-009 Tegal 903e lower electrode 41-362-002 32-415-002 50-056-001 200 ASHER, TEGAL PLASMALINE 200 8.5X7D METAL CHAMBER 5-8-02