Parts For Sale TEGAL 99-103-001 TEGAL 99-103-001 Request Quote Do not fill in this field Request for Quote First Name: * Last Name: * Email: * Confirm Email: * Company: Quantity: Message: Conditions:NewUsedRefurbishedNeeds RepairSecond Source (New)Second Source (Used) Part Details TEGAL 99-103-001 Manufacturer TEGAL Part Number 99-103-001 Description PCB, SEND/RECEIVE MOTHER LMB-1 Status Available Approx. Qty 2 Pricing Submit RFQ to Get Prices Most Recent Supplier Data Condition Quantity Country New 2.0 US Other TEGAL Parts 150 mm 150 mm 25 slot Aluminum wafer carrier. 58-073-001 37-221-002 UPPER ELECT ANOD, NON ANODIZED 52-058-002 40-768-006 Insulator Ring 31-406-003 WAFER SENSOR ASSY-VCE 40-467-001 42-362-001 47-101-002 39-894-001 52-047-002 39-735-004 Tegal 903e lower electrode