Parts For Sale TEGAL 99-086-001 TEGAL 99-086-001 Request Quote Do not fill in this field Request for Quote First Name: * Last Name: * Email: * Confirm Email: * Company: Quantity: Message: Conditions:NewUsedRefurbishedNeeds RepairSecond Source (New)Second Source (Used) Part Details TEGAL 99-086-001 Manufacturer TEGAL Part Number 99-086-001 Description PCB, AUTOTUNE AOT-1 Status Available Approx. Qty 1 Pricing Submit RFQ to Get Prices Most Recent Supplier Data Condition Quantity Country New 1.0 US Other TEGAL Parts 40-395-002 Ring Ceramic 125C Castellated 40-481-002 Insulator Ring 80-195-450 80-1025-01 HEATER 42-456-003 42-180-001/002 50-056-001 39-533-001 37-668-001 150 mm 150 mm 25 slot Aluminum wafer carrier.