Parts For Sale TEGAL 83-325-002 TEGAL 83-325-002 Request Quote Do not fill in this field Request for Quote First Name: * Last Name: * Email: * Confirm Email: * Company: Quantity: Message: Conditions:NewUsedRefurbishedNeeds RepairSecond Source (New)Second Source (Used) Part Details TEGAL 83-325-002 Manufacturer TEGAL Part Number 83-325-002 Description Status Available Approx. Qty 4 Pricing Submit RFQ to Get Prices Most Recent Supplier Data Condition Quantity Country Second Source (New) 4.0 US Other TEGAL Parts 99-247-003 SPATULA INTERFACE 46-180-001 40-481-002 Insulator Ring 51-191-001 46-786-001 46-787-002 39-741-009 Tegal 903e lower electrode 40-790-001 FOCUS RING 40-576-003-C Ring Ceramic Focus Castellated 39-665-001 83-288-001