Parts For Sale TEGAL 83-278-001 TEGAL 83-278-001 Request Quote Do not fill in this field Request for Quote First Name: * Last Name: * Email: * Confirm Email: * Company: Quantity: Message: Conditions:NewUsedRefurbishedNeeds RepairSecond Source (New)Second Source (Used) Part Details TEGAL 83-278-001 Manufacturer TEGAL Part Number 83-278-001 Description Status Available Approx. Qty 2 Pricing Submit RFQ to Get Prices Most Recent Supplier Data Condition Quantity Country Second Source (New) 2.0 US Other TEGAL Parts 58-073-001 46-810-001 74-101-001 40-467-001 40-140-001 RING, CERAMIC INSULATOR 39-894-001 39-956-001 50-056-001 55-008-001 BELT SPAT 150 mm 150 mm 25 slot Aluminum wafer carrier.
