Parts For Sale TEGAL 83-278-001 TEGAL 83-278-001 Request Quote Do not fill in this field Request for Quote First Name: * Last Name: * Email: * Confirm Email: * Company: Quantity: Message: Conditions:NewUsedRefurbishedNeeds RepairSecond Source (New)Second Source (Used) Part Details TEGAL 83-278-001 Manufacturer TEGAL Part Number 83-278-001 Description Status Available Approx. Qty 2 Pricing Submit RFQ to Get Prices Most Recent Supplier Data Condition Quantity Country Second Source (New) 2.0 US Other TEGAL Parts 51-259-003 52-050-001 99-287-003 SHUTTLE INTERFACE BOARD 46-1000-001 52-167-001 58-046-001 37-471-001A 80-200-121 BEARING DOOR T915 TEGAL CORPORATION 80-200-144 BSHG BALL 3/8B 5/8OD 7/8L STL