Parts For Sale TEGAL 83-216-001 TEGAL 83-216-001 Request Quote Do not fill in this field Request for Quote First Name: * Last Name: * Email: * Confirm Email: * Company: Quantity: Message: Conditions:NewUsedRefurbishedNeeds RepairSecond Source (New)Second Source (Used) Part Details TEGAL 83-216-001 Manufacturer TEGAL Part Number 83-216-001 Description Status Available Approx. Qty 1 Pricing Submit RFQ to Get Prices Most Recent Supplier Data Condition Quantity Country Second Source (New) 1.0 US Other TEGAL Parts 31-406-003 WAFER SENSOR ASSY-VCE 39-756-003 80-195-450 51-056-001 42-826-005 39-380-001 37-221-003 UPPER ELECT ANOD., .021 HOLE RAD. HOLE 51-178-001 37-175-001A 40-790-001 FOCUS RING 37-221-001 UPPER ELECT, .014 HOLE NO RAD. 150 mm 150 mm 25 slot Aluminum wafer carrier.
