Parts For Sale TEGAL 83-215-001 TEGAL 83-215-001 Request Quote Do not fill in this field Request for Quote First Name: * Last Name: * Email: * Confirm Email: * Company: Quantity: Message: Conditions:NewUsedRefurbishedNeeds RepairSecond Source (New)Second Source (Used) Part Details TEGAL 83-215-001 Manufacturer TEGAL Part Number 83-215-001 Description Status Available Approx. Qty 2 Pricing Submit RFQ to Get Prices Most Recent Supplier Data Condition Quantity Country Second Source (New) 2.0 US Other TEGAL Parts 37-221-002 UPPER ELECT ANOD, NON ANODIZED 51-259-003 40-481-002 Insulator Ring 52-050-001 46-1000-001 37-221-003 UPPER ELECT ANOD., .021 HOLE RAD. HOLE 52-167-001 40-576-003-C Ring Ceramic Focus Castellated 58-046-001 37-471-001A