Parts For Sale TEGAL 83-164-001 TEGAL 83-164-001 Request Quote Do not fill in this field Request for Quote First Name: * Last Name: * Email: * Confirm Email: * Company: Quantity: Message: Conditions:NewUsedRefurbishedNeeds RepairSecond Source (New)Second Source (Used) Part Details TEGAL 83-164-001 Manufacturer TEGAL Part Number 83-164-001 Description Status Available Approx. Qty 8 Pricing Submit RFQ to Get Prices Most Recent Supplier Data Condition Quantity Country Second Source (New) 8.0 US Other TEGAL Parts 58-073-001 161-0040K VALVE, INLINE VACUUM 37-383-004 31-406-003 WAFER SENSOR ASSY-VCE 46-810-001 40-467-001 39-894-001 39-832-001 31-388-001 CONNECTER RF CONN ASSY 31-388-001 A4T1 PAD ETCHER TEGAL 903E 39-735-004 Tegal 903e lower electrode
