Parts For Sale TEGAL 83-164-001 TEGAL 83-164-001 Request Quote Do not fill in this field Request for Quote First Name: * Last Name: * Email: * Confirm Email: * Company: Quantity: Message: Conditions:NewUsedRefurbishedNeeds RepairSecond Source (New)Second Source (Used) Part Details TEGAL 83-164-001 Manufacturer TEGAL Part Number 83-164-001 Description Status Available Approx. Qty 8 Pricing Submit RFQ to Get Prices Most Recent Supplier Data Condition Quantity Country Second Source (New) 8.0 US Other TEGAL Parts 40-768-004 Insulator Ring 33-349-004 ELECTRODE, CONDEHEAD UPPER 40-481-002 Insulator Ring 80-195-450 51-056-001 42-826-005 39-380-001 39-741-009 Tegal 903e lower electrode 51-178-001 37-175-001A
