Parts For Sale TEGAL 83-164-001 TEGAL 83-164-001 Request Quote Do not fill in this field Request for Quote First Name: * Last Name: * Email: * Confirm Email: * Company: Quantity: Message: Conditions:NewUsedRefurbishedNeeds RepairSecond Source (New)Second Source (Used) Part Details TEGAL 83-164-001 Manufacturer TEGAL Part Number 83-164-001 Description Status Available Approx. Qty 8 Pricing Submit RFQ to Get Prices Most Recent Supplier Data Condition Quantity Country Second Source (New) 8.0 US Other TEGAL Parts 58-073-001 37-181-001 38-023-001 COOLING RING 40-395-001 RING, FLAT 6 74-101-001 99-138-004 PRINTED CIRCUIT BOARD TEGAL 99-138-004 TEMP MONITOR PCB 39-894-001 39-956-001 40-295-003 FOCUS RING 39-741-009 Tegal 903e lower electrode 50-056-001
