Parts For Sale TEGAL 83-164-001 TEGAL 83-164-001 Request Quote Do not fill in this field Request for Quote First Name: * Last Name: * Email: * Confirm Email: * Company: Quantity: Message: Conditions:NewUsedRefurbishedNeeds RepairSecond Source (New)Second Source (Used) Part Details TEGAL 83-164-001 Manufacturer TEGAL Part Number 83-164-001 Description Status Available Approx. Qty 8 Pricing Submit RFQ to Get Prices Most Recent Supplier Data Condition Quantity Country Second Source (New) 8.0 US Other TEGAL Parts 39-853-005 46-177-001 37-223-008 93-229-005 RF CABLE 901E 40-374-006 46-787-002 50-079-002 29-464-001 SPR, TEGAL KIT CHMBR GRND OEM PN equiv: 29-464-001 40-140-003 RING, INSULATOR, CERAMIC .20-99.5% 83-288-001 150 mm 150 mm 25 slot Aluminum wafer carrier.
