Parts For Sale TEGAL 81-105-232 TEGAL 81-105-232 Request Quote Do not fill in this field Request for Quote First Name: * Last Name: * Email: * Confirm Email: * Company: Quantity: Message: Conditions:NewUsedRefurbishedNeeds RepairSecond Source (New)Second Source (Used) Part Details TEGAL 81-105-232 Manufacturer TEGAL Part Number 81-105-232 Description VALVE H20 PRESS REG Status Available Approx. Qty 1 Pricing Submit RFQ to Get Prices Most Recent Supplier Data Condition Quantity Country New 1.0 US Other TEGAL Parts 46-879-001 31-406-003 WAFER SENSOR ASSY-VCE 80-650-053 ACTUATOR 40-140-001 RING, CERAMIC INSULATOR 47-583-001 40-295-003 FOCUS RING 47-695-001 40-576-003-C Ring Ceramic Focus Castellated 37-221-001 UPPER ELECT, .014 HOLE NO RAD. 50-056-001 37-222-002 Cooling Plate 40-140-003 RING, INSULATOR, CERAMIC .20-99.5%