Parts For Sale TEGAL 81-007-146 TEGAL 81-007-146 Request Quote Do not fill in this field Request for Quote First Name: * Last Name: * Email: * Confirm Email: * Company: Quantity: Message: Conditions:NewUsedRefurbishedNeeds RepairSecond Source (New)Second Source (Used) Part Details TEGAL 81-007-146 Manufacturer TEGAL Part Number 81-007-146 Description SEAL RING PUMP Status Available Approx. Qty 3 Pricing Submit RFQ to Get Prices Most Recent Supplier Data Condition Quantity Country New 1.0 US Unknown 2.0 US Other TEGAL Parts 40-768-006 Insulator Ring 42-667-001 44-607-003 44-421-001 40-295-003 FOCUS RING 41-103-008 46-774-001 44-957-001 40-304-001 ELECTRODE, INSULATOR LOWER 37-221-001 UPPER ELECT, .014 HOLE NO RAD.
