Parts For Sale TEGAL 80-210-002 TEGAL 80-210-002 Request Quote Do not fill in this field Request for Quote First Name: * Last Name: * Email: * Confirm Email: * Company: Quantity: Message: Conditions:NewUsedRefurbishedNeeds RepairSecond Source (New)Second Source (Used) Part Details TEGAL 80-210-002 Manufacturer TEGAL Part Number 80-210-002 Description Status Available Approx. Qty Unknown Pricing Submit RFQ to Get Prices Most Recent Supplier Data Condition Quantity Country New – US Other TEGAL Parts CR1008-00104 31-406-003 WAFER SENSOR ASSY-VCE CR1144-00104 40-140-001 RING, CERAMIC INSULATOR 1106915402 MOTOR AND PUMPP/N:1106915402 CR1144-00103 CR1144-00103 37-221-003 UPPER ELECT ANOD., .021 HOLE RAD. HOLE 83-254-002 40-576-003-C Ring Ceramic Focus Castellated 37-221-001 UPPER ELECT, .014 HOLE NO RAD. CR1303-10202 37-222-002 Cooling Plate