Parts For Sale TEGAL 80-165-086 TEGAL 80-165-086 Request Quote Do not fill in this field Request for Quote First Name: * Last Name: * Email: * Confirm Email: * Company: Quantity: Message: Conditions:NewUsedRefurbishedNeeds RepairSecond Source (New)Second Source (Used) Part Details TEGAL 80-165-086 Manufacturer TEGAL Part Number 80-165-086 Description Status Available Approx. Qty Unknown Pricing Submit RFQ to Get Prices Most Recent Supplier Data Condition Quantity Country New – US Other TEGAL Parts CR1008-00104 39-680-003 ELECTRODE, CONEHEAD VENTED 40-481-002 Insulator Ring 40-395-001 RING, FLAT 6 CR1144-00104 29-464-001 SPR, TEGAL KIT CHMBR GRND OEM PN equiv: 29-464-001 1106915402 MOTOR AND PUMPP/N:1106915402 CR1144-00103 CR1144-00103 83-254-002 40-304-001 ELECTRODE, INSULATOR LOWER CR1303-10202 40-140-003 RING, INSULATOR, CERAMIC .20-99.5%