Parts For Sale TEGAL 80-080-028 TEGAL 80-080-028 Request Quote Do not fill in this field Request for Quote First Name: * Last Name: * Email: * Confirm Email: * Company: Quantity: Message: Conditions:NewUsedRefurbishedNeeds RepairSecond Source (New)Second Source (Used) Part Details TEGAL 80-080-028 Manufacturer TEGAL Part Number 80-080-028 Description VALVE, FILTER Status Available Approx. Qty 1 Pricing Submit RFQ to Get Prices Most Recent Supplier Data Condition Quantity Country New 1.0 US Other TEGAL Parts 46-879-001 47-583-001 47-695-001 39-733-004 Tegal 903e lower electrode 39-741-009 Tegal 903e lower electrode 41-362-002 32-415-002 40-790-001 FOCUS RING 50-056-001 37-222-002 Cooling Plate 39-680-005 ELECTRODE, UPPER VENTED HARD ANOD. 80-200-121 BEARING DOOR T915 TEGAL CORPORATION
