Parts For Sale TEGAL 80-055-515 TEGAL 80-055-515 Request Quote Do not fill in this field Request for Quote First Name: * Last Name: * Email: * Confirm Email: * Company: Quantity: Message: Conditions:NewUsedRefurbishedNeeds RepairSecond Source (New)Second Source (Used) Part Details TEGAL 80-055-515 Manufacturer TEGAL Part Number 80-055-515 Description RF GEN,100W,450KHZ,208V,NRTL Status Available Approx. Qty 1 Pricing Submit RFQ to Get Prices Most Recent Supplier Data Condition Quantity Country New 1.0 – Other TEGAL Parts 46-879-001 39-756-003 47-583-001 40-295-003 FOCUS RING 47-695-001 41-362-002 32-415-002 50-056-001 150 mm 150 mm 25 slot Aluminum wafer carrier.