Parts For Sale TEGAL 74-109-003 TEGAL 74-109-003 Request Quote Do not fill in this field Request for Quote First Name: * Last Name: * Email: * Confirm Email: * Company: Quantity: Message: Conditions:NewUsedRefurbishedNeeds RepairSecond Source (New)Second Source (Used) Part Details TEGAL 74-109-003 Manufacturer TEGAL Part Number 74-109-003 Description Status Available Approx. Qty Unknown Pricing Submit RFQ to Get Prices Most Recent Supplier Data Condition Quantity Country New – US Other TEGAL Parts 74-274-001 40-481-002 Insulator Ring 80-195-450 80-095-057 PROBE TEMPERATURE 3/160D 4L SST OPM: ANALOG DEVICES P/N ... CR1008-00408EX CR1008-00408EX 29-464-001 SPR, TEGAL KIT CHMBR GRND OEM PN equiv: 29-464-001 00-0917-2 5" GUIDE RING #G00-0917-2 83-079-001 CR-1113-00301 41-399-001 Tegal Part # 41-399-001 Rev.A Gasket, RF-90XE 39-735-004 Tegal 903e lower electrode 40-140-003 RING, INSULATOR, CERAMIC .20-99.5%