Parts For Sale TEGAL 74-109-003 TEGAL 74-109-003 Request Quote Do not fill in this field Request for Quote First Name: * Last Name: * Email: * Confirm Email: * Company: Quantity: Message: Conditions:NewUsedRefurbishedNeeds RepairSecond Source (New)Second Source (Used) Part Details TEGAL 74-109-003 Manufacturer TEGAL Part Number 74-109-003 Description Status Available Approx. Qty Unknown Pricing Submit RFQ to Get Prices Most Recent Supplier Data Condition Quantity Country New – US Other TEGAL Parts 83-286-001 80-650-053 ACTUATOR 80-195-450 40-140-001 RING, CERAMIC INSULATOR 1106915402 MOTOR AND PUMPP/N:1106915402 40-295-003 FOCUS RING 80-202-297 BELT 1/4W 115GRV 80-202-297 A4T1 PAD ETCHER TEGAL 903E 74107-002 83-254-002 40-576-003-C Ring Ceramic Focus Castellated 40-304-001 ELECTRODE, INSULATOR LOWER 83-288-001