Parts For Sale TEGAL 74-109-003 TEGAL 74-109-003 Request Quote Do not fill in this field Request for Quote First Name: * Last Name: * Email: * Confirm Email: * Company: Quantity: Message: Conditions:NewUsedRefurbishedNeeds RepairSecond Source (New)Second Source (Used) Part Details TEGAL 74-109-003 Manufacturer TEGAL Part Number 74-109-003 Description Status Available Approx. Qty Unknown Pricing Submit RFQ to Get Prices Most Recent Supplier Data Condition Quantity Country New – US Other TEGAL Parts 40-395-002 Ring Ceramic 125C Castellated CR1008-00104 31-406-003 WAFER SENSOR ASSY-VCE 40-395-001 RING, FLAT 6 CR1144-00104RW CR1008-00408EX CR1008-00408EX CR1144-00103 CR1144-00103 80-200-053 CLAMP,HOSE,WORM DR,2 1/4,SST 83-108-001 83-288-001 150 mm 150 mm 25 slot Aluminum wafer carrier.