Parts For Sale TEGAL 59-013-001 TEGAL 59-013-001 Request Quote Do not fill in this field Request for Quote First Name: * Last Name: * Email: * Confirm Email: * Company: Quantity: Message: Conditions:NewUsedRefurbishedNeeds RepairSecond Source (New)Second Source (Used) Part Details TEGAL 59-013-001 Manufacturer TEGAL Part Number 59-013-001 Description Status Available Approx. Qty Unknown Pricing Submit RFQ to Get Prices Most Recent Supplier Data Condition Quantity Country New – US Other TEGAL Parts 40-395-002 Ring Ceramic 125C Castellated 52-058-002 46-1006-001 74-038-001 74-107-001 99-287-003 SHUTTLE INTERFACE BOARD 74-003-002 CR1144-00103 CR1144-00103 39-733-004 Tegal 903e lower electrode 83-108-001 50-056-001 83-288-001