Parts For Sale TEGAL 59-002-001 TEGAL 59-002-001 Request Quote Do not fill in this field Request for Quote First Name: * Last Name: * Email: * Confirm Email: * Company: Quantity: Message: Conditions:NewUsedRefurbishedNeeds RepairSecond Source (New)Second Source (Used) Part Details TEGAL 59-002-001 Manufacturer TEGAL Part Number 59-002-001 Description Status Available Approx. Qty 5 Pricing Submit RFQ to Get Prices Most Recent Supplier Data Condition Quantity Country Second Source (New) 5.0 US Other TEGAL Parts 58-073-001 37-383-004 39-680-003 ELECTRODE, CONEHEAD VENTED 38-023-001 COOLING RING 93-229-005 RF CABLE 901E 83-259-001 46-810-001 40-467-001 39-894-001 29-464-001 SPR, TEGAL KIT CHMBR GRND OEM PN equiv: 29-464-001 39-832-001 80-202-357 O-Ring
