Parts For Sale TEGAL 56-031-001 TEGAL 56-031-001 Request Quote Do not fill in this field Request for Quote First Name: * Last Name: * Email: * Confirm Email: * Company: Quantity: Message: Conditions:NewUsedRefurbishedNeeds RepairSecond Source (New)Second Source (Used) Part Details TEGAL 56-031-001 Manufacturer TEGAL Part Number 56-031-001 Description Status Available Approx. Qty Unknown Pricing Submit RFQ to Get Prices Most Recent Supplier Data Condition Quantity Country New – US Other TEGAL Parts 74-038-001 80-195-450 CR1144-00104 39-741-026 Tegal 903e lower electrode 1106915402 MOTOR AND PUMPP/N:1106915402 CR1144-00103 CR1144-00103 99-249-002 PCB TEGAL END POINT DETECTOR 83-288-001 150 mm 150 mm 25 slot Aluminum wafer carrier.