Parts For Sale TEGAL 56-006-001 TEGAL 56-006-001 Request Quote Do not fill in this field Request for Quote First Name: * Last Name: * Email: * Confirm Email: * Company: Quantity: Message: Conditions:NewUsedRefurbishedNeeds RepairSecond Source (New)Second Source (Used) Part Details TEGAL 56-006-001 Manufacturer TEGAL Part Number 56-006-001 Description Status Available Approx. Qty Unknown Pricing Submit RFQ to Get Prices Most Recent Supplier Data Condition Quantity Country New – US Other TEGAL Parts 74-274-001 58-053-001 31-406-003 WAFER SENSOR ASSY-VCE 46-1006-001 39-756-003 80-195-450 CR1008-00408EX CR1008-00408EX 00-0917-2 5" GUIDE RING #G00-0917-2 CR-1113-00301 41-399-001 Tegal Part # 41-399-001 Rev.A Gasket, RF-90XE