Parts For Sale TEGAL 54-011-001 TEGAL 54-011-001 Request Quote Do not fill in this field Request for Quote First Name: * Last Name: * Email: * Confirm Email: * Company: Quantity: Message: Conditions:NewUsedRefurbishedNeeds RepairSecond Source (New)Second Source (Used) Part Details TEGAL 54-011-001 Manufacturer TEGAL Part Number 54-011-001 Description Status Available Approx. Qty 91 Pricing Submit RFQ to Get Prices Most Recent Supplier Data Condition Quantity Country Second Source (New) 91.0 US Other TEGAL Parts 39-853-005 37-411-001 37-525-002 99-138-004 PRINTED CIRCUIT BOARD TEGAL 99-138-004 TEMP MONITOR PCB 37-605-001 58-043-004 CR1144-00103 CR1144-00103 40-295-003 FOCUS RING 37-479-001B