Parts For Sale TEGAL 53-087-001 TEGAL 53-087-001 Request Quote Do not fill in this field Request for Quote First Name: * Last Name: * Email: * Confirm Email: * Company: Quantity: Message: Conditions:NewUsedRefurbishedNeeds RepairSecond Source (New)Second Source (Used) Part Details TEGAL 53-087-001 Manufacturer TEGAL Part Number 53-087-001 Description Status Available Approx. Qty Unknown Pricing Submit RFQ to Get Prices Most Recent Supplier Data Condition Quantity Country New – US Other TEGAL Parts 57-027-001 33-349-004 ELECTRODE, CONDEHEAD UPPER 40-768-006 Insulator Ring 74-038-001 56-006-001 33-085-002 BELLOW,LWR ELCTD #33-085-002 A4T1 PAD ETCHER TEGAL 903E 80-095-057 PROBE TEMPERATURE 3/160D 4L SST OPM: ANALOG DEVICES P/N ... 29-464-001 SPR, TEGAL KIT CHMBR GRND OEM PN equiv: 29-464-001 74-003-002 37-221-001 UPPER ELECT, .014 HOLE NO RAD. 58-046-001 83-288-001