Parts For Sale TEGAL 53-085-001 TEGAL 53-085-001 Request Quote Do not fill in this field Request for Quote First Name: * Last Name: * Email: * Confirm Email: * Company: Quantity: Message: Conditions:NewUsedRefurbishedNeeds RepairSecond Source (New)Second Source (Used) Part Details TEGAL 53-085-001 Manufacturer TEGAL Part Number 53-085-001 Description Status Available Approx. Qty 1 Pricing Submit RFQ to Get Prices Most Recent Supplier Data Condition Quantity Country Second Source (New) 1.0 US Other TEGAL Parts 40-395-002 Ring Ceramic 125C Castellated 46-177-001 37-223-008 40-481-002 Insulator Ring 46-1006-001 40-374-006 46-787-002 50-079-002 39-733-004 Tegal 903e lower electrode 80-200-053 CLAMP,HOSE,WORM DR,2 1/4,SST 40-260-001 WINDOW, SAPPHIRE 1x2.5 83-288-001
