Parts For Sale TEGAL 53-085-001 TEGAL 53-085-001 Request Quote Do not fill in this field Request for Quote First Name: * Last Name: * Email: * Confirm Email: * Company: Quantity: Message: Conditions:NewUsedRefurbishedNeeds RepairSecond Source (New)Second Source (Used) Part Details TEGAL 53-085-001 Manufacturer TEGAL Part Number 53-085-001 Description Status Available Approx. Qty 1 Pricing Submit RFQ to Get Prices Most Recent Supplier Data Condition Quantity Country Second Source (New) 1.0 US Other TEGAL Parts 40-395-002 Ring Ceramic 125C Castellated 46-180-001 46-1006-001 39-756-003 93-229-005 RF CABLE 901E 51-191-001 46-786-001 46-787-002 39-665-001 200 ASHER, TEGAL PLASMALINE 200 8.5X7D METAL CHAMBER 5-8-02 83-288-001