Parts For Sale TEGAL 53-084-001 TEGAL 53-084-001 Request Quote Do not fill in this field Request for Quote First Name: * Last Name: * Email: * Confirm Email: * Company: Quantity: Message: Conditions:NewUsedRefurbishedNeeds RepairSecond Source (New)Second Source (Used) Part Details TEGAL 53-084-001 Manufacturer TEGAL Part Number 53-084-001 Description Status Available Approx. Qty 2 Pricing Submit RFQ to Get Prices Most Recent Supplier Data Condition Quantity Country Second Source (New) 2.0 US Other TEGAL Parts 80-650-053 ACTUATOR 46-1006-001 74-098-001 39-741-026 Tegal 903e lower electrode 52-050-001 46-1000-001 37-221-003 UPPER ELECT ANOD., .021 HOLE RAD. HOLE 52-167-001 58-046-001 37-471-001A 40-140-003 RING, INSULATOR, CERAMIC .20-99.5%