Parts For Sale TEGAL 53-084-001 TEGAL 53-084-001 Request Quote Do not fill in this field Request for Quote First Name: * Last Name: * Email: * Confirm Email: * Company: Quantity: Message: Conditions:NewUsedRefurbishedNeeds RepairSecond Source (New)Second Source (Used) Part Details TEGAL 53-084-001 Manufacturer TEGAL Part Number 53-084-001 Description Status Available Approx. Qty 2 Pricing Submit RFQ to Get Prices Most Recent Supplier Data Condition Quantity Country Second Source (New) 2.0 US Other TEGAL Parts 38-023-001 COOLING RING 37-411-001 54-011-001 37-605-001 80-095-057 PROBE TEMPERATURE 3/160D 4L SST OPM: ANALOG DEVICES P/N ... 58-043-004 CR1144-00103 CR1144-00103 40-295-003 FOCUS RING 37-479-001B 40-304-001 ELECTRODE, INSULATOR LOWER 50-056-001
