Parts For Sale TEGAL 53-079-001 TEGAL 53-079-001 Request Quote Do not fill in this field Request for Quote First Name: * Last Name: * Email: * Confirm Email: * Company: Quantity: Message: Conditions:NewUsedRefurbishedNeeds RepairSecond Source (New)Second Source (Used) Part Details TEGAL 53-079-001 Manufacturer TEGAL Part Number 53-079-001 Description Status Available Approx. Qty Unknown Pricing Submit RFQ to Get Prices Most Recent Supplier Data Condition Quantity Country New – US Other TEGAL Parts 31-406-003 WAFER SENSOR ASSY-VCE 74-038-001 56-006-001 80-195-450 CR1144-00104 99-138-004 PRINTED CIRCUIT BOARD TEGAL 99-138-004 TEMP MONITOR PCB 1106915402 MOTOR AND PUMPP/N:1106915402 CR1144-00103 CR1144-00103 39-735-004 Tegal 903e lower electrode