Parts For Sale TEGAL 52-188-001 TEGAL 52-188-001 Request Quote Do not fill in this field Request for Quote First Name: * Last Name: * Email: * Confirm Email: * Company: Quantity: Message: Conditions:NewUsedRefurbishedNeeds RepairSecond Source (New)Second Source (Used) Part Details TEGAL 52-188-001 Manufacturer TEGAL Part Number 52-188-001 Description Status Available Approx. Qty 16 Pricing Submit RFQ to Get Prices Most Recent Supplier Data Condition Quantity Country Second Source (New) 16.0 US Other TEGAL Parts 58-073-001 37-221-002 UPPER ELECT ANOD, NON ANODIZED 37-383-004 46-1006-001 46-810-001 40-467-001 39-894-001 39-832-001 40-576-003-C Ring Ceramic Focus Castellated 39-735-004 Tegal 903e lower electrode 55-008-001 BELT SPAT
