Parts For Sale TEGAL 52-188-001 TEGAL 52-188-001 Request Quote Do not fill in this field Request for Quote First Name: * Last Name: * Email: * Confirm Email: * Company: Quantity: Message: Conditions:NewUsedRefurbishedNeeds RepairSecond Source (New)Second Source (Used) Part Details TEGAL 52-188-001 Manufacturer TEGAL Part Number 52-188-001 Description Status Available Approx. Qty 16 Pricing Submit RFQ to Get Prices Most Recent Supplier Data Condition Quantity Country Second Source (New) 16.0 US Other TEGAL Parts 58-073-001 37-181-001 74-101-001 39-894-001 39-956-001 40-295-003 FOCUS RING 37-221-003 UPPER ELECT ANOD., .021 HOLE RAD. HOLE 80-202-357 O-Ring 50-056-001 80-200-121 BEARING DOOR T915 TEGAL CORPORATION
