Parts For Sale TEGAL 52-187-001 TEGAL 52-187-001 Request Quote Do not fill in this field Request for Quote First Name: * Last Name: * Email: * Confirm Email: * Company: Quantity: Message: Conditions:NewUsedRefurbishedNeeds RepairSecond Source (New)Second Source (Used) Part Details TEGAL 52-187-001 Manufacturer TEGAL Part Number 52-187-001 Description Status Available Approx. Qty 11 Pricing Submit RFQ to Get Prices Most Recent Supplier Data Condition Quantity Country Second Source (New) 11.0 US Other TEGAL Parts 58-073-001 37-181-001 33-349-004 ELECTRODE, CONDEHEAD UPPER 80-650-053 ACTUATOR 74-101-001 39-894-001 39-956-001 50-056-001 40-140-003 RING, INSULATOR, CERAMIC .20-99.5%
