Parts For Sale TEGAL 52-147-001 TEGAL 52-147-001 Request Quote Do not fill in this field Request for Quote First Name: * Last Name: * Email: * Confirm Email: * Company: Quantity: Message: Conditions:NewUsedRefurbishedNeeds RepairSecond Source (New)Second Source (Used) Part Details TEGAL 52-147-001 Manufacturer TEGAL Part Number 52-147-001 Description Status Available Approx. Qty 3 Pricing Submit RFQ to Get Prices Most Recent Supplier Data Condition Quantity Country Second Source (New) 3.0 US Other TEGAL Parts 99-247-003 SPATULA INTERFACE 31-406-003 WAFER SENSOR ASSY-VCE 74-098-001 52-050-001 39-761-001 46-1000-001 40-295-003 FOCUS RING 37-221-003 UPPER ELECT ANOD., .021 HOLE RAD. HOLE 80-200-342 BAND CONT,FEM .125PIN .320L,BC 80-200-342 A4T1 PAD ETCHE ... 52-167-001 58-046-001 37-471-001A