Parts For Sale TEGAL 52-147-001 TEGAL 52-147-001 Request Quote Do not fill in this field Request for Quote First Name: * Last Name: * Email: * Confirm Email: * Company: Quantity: Message: Conditions:NewUsedRefurbishedNeeds RepairSecond Source (New)Second Source (Used) Part Details TEGAL 52-147-001 Manufacturer TEGAL Part Number 52-147-001 Description Status Available Approx. Qty 3 Pricing Submit RFQ to Get Prices Most Recent Supplier Data Condition Quantity Country Second Source (New) 3.0 US Other TEGAL Parts 58-073-001 40-768-004 Insulator Ring 37-181-001 39-741-004 ELECTRODE, LOWER 6" 31-406-003 WAFER SENSOR ASSY-VCE 74-101-001 39-894-001 39-956-001 50-056-001
