Parts For Sale TEGAL 52-147-001 TEGAL 52-147-001 Request Quote Do not fill in this field Request for Quote First Name: * Last Name: * Email: * Confirm Email: * Company: Quantity: Message: Conditions:NewUsedRefurbishedNeeds RepairSecond Source (New)Second Source (Used) Part Details TEGAL 52-147-001 Manufacturer TEGAL Part Number 52-147-001 Description Status Available Approx. Qty 3 Pricing Submit RFQ to Get Prices Most Recent Supplier Data Condition Quantity Country Second Source (New) 3.0 US Other TEGAL Parts 33-349-004 ELECTRODE, CONDEHEAD UPPER 46-177-001 161-0040K VALVE, INLINE VACUUM 37-223-008 93-229-005 RF CABLE 901E 40-374-006 46-787-002 33-085-002 BELLOW,LWR ELCTD #33-085-002 A4T1 PAD ETCHER TEGAL 903E 50-079-002 39-741-026 Tegal 903e lower electrode 55-008-001 BELT SPAT 83-288-001
