Parts For Sale TEGAL 52-147-001 TEGAL 52-147-001 Request Quote Do not fill in this field Request for Quote First Name: * Last Name: * Email: * Confirm Email: * Company: Quantity: Message: Conditions:NewUsedRefurbishedNeeds RepairSecond Source (New)Second Source (Used) Part Details TEGAL 52-147-001 Manufacturer TEGAL Part Number 52-147-001 Description Status Available Approx. Qty 3 Pricing Submit RFQ to Get Prices Most Recent Supplier Data Condition Quantity Country Second Source (New) 3.0 US Other TEGAL Parts 44-432-002 39-680-003 ELECTRODE, CONEHEAD VENTED 37-411-001 54-011-001 37-605-001 58-043-004 CR1144-00103 CR1144-00103 40-576-003-C Ring Ceramic Focus Castellated 37-221-001 UPPER ELECT, .014 HOLE NO RAD. 40-140-003 RING, INSULATOR, CERAMIC .20-99.5%
