Parts For Sale TEGAL 52-147-001 TEGAL 52-147-001 Request Quote Do not fill in this field Request for Quote First Name: * Last Name: * Email: * Confirm Email: * Company: Quantity: Message: Conditions:NewUsedRefurbishedNeeds RepairSecond Source (New)Second Source (Used) Part Details TEGAL 52-147-001 Manufacturer TEGAL Part Number 52-147-001 Description Status Available Approx. Qty 3 Pricing Submit RFQ to Get Prices Most Recent Supplier Data Condition Quantity Country Second Source (New) 3.0 US Other TEGAL Parts 99-247-003 SPATULA INTERFACE 80-650-053 ACTUATOR 80-195-450 51-056-001 42-826-005 33-085-002 BELLOW,LWR ELCTD #33-085-002 A4T1 PAD ETCHER TEGAL 903E 39-380-001 51-178-001 37-175-001A 150 mm 150 mm 25 slot Aluminum wafer carrier.
