Parts For Sale TEGAL 52-147-001 TEGAL 52-147-001 Request Quote Do not fill in this field Request for Quote First Name: * Last Name: * Email: * Confirm Email: * Company: Quantity: Message: Conditions:NewUsedRefurbishedNeeds RepairSecond Source (New)Second Source (Used) Part Details TEGAL 52-147-001 Manufacturer TEGAL Part Number 52-147-001 Description Status Available Approx. Qty 3 Pricing Submit RFQ to Get Prices Most Recent Supplier Data Condition Quantity Country Second Source (New) 3.0 US Other TEGAL Parts 58-073-001 37-383-004 31-406-003 WAFER SENSOR ASSY-VCE 46-810-001 40-467-001 39-894-001 37-221-003 UPPER ELECT ANOD., .021 HOLE RAD. HOLE 52-171-001 80-202-357 O-Ring
