Parts For Sale TEGAL 52-146-002 TEGAL 52-146-002 Request Quote Do not fill in this field Request for Quote First Name: * Last Name: * Email: * Confirm Email: * Company: Quantity: Message: Conditions:NewUsedRefurbishedNeeds RepairSecond Source (New)Second Source (Used) Part Details TEGAL 52-146-002 Manufacturer TEGAL Part Number 52-146-002 Description Status Available Approx. Qty 5 Pricing Submit RFQ to Get Prices Most Recent Supplier Data Condition Quantity Country Second Source (New) 5.0 US Other TEGAL Parts 39-756-003 37-411-001 54-011-001 37-605-001 58-043-004 99-287-003 SHUTTLE INTERFACE BOARD CR1144-00103 CR1144-00103 37-479-001B 41-399-001 Tegal Part # 41-399-001 Rev.A Gasket, RF-90XE
