Parts For Sale TEGAL 52-146-002 TEGAL 52-146-002 Request Quote Do not fill in this field Request for Quote First Name: * Last Name: * Email: * Confirm Email: * Company: Quantity: Message: Conditions:NewUsedRefurbishedNeeds RepairSecond Source (New)Second Source (Used) Part Details TEGAL 52-146-002 Manufacturer TEGAL Part Number 52-146-002 Description Status Available Approx. Qty 5 Pricing Submit RFQ to Get Prices Most Recent Supplier Data Condition Quantity Country Second Source (New) 5.0 US Other TEGAL Parts 80-650-053 ACTUATOR 74-098-001 52-050-001 46-1000-001 40-295-003 FOCUS RING 80-200-342 BAND CONT,FEM .125PIN .320L,BC 80-200-342 A4T1 PAD ETCHE ... 52-167-001 58-046-001 37-471-001A