Parts For Sale TEGAL 52-146-002 TEGAL 52-146-002 Request Quote Do not fill in this field Request for Quote First Name: * Last Name: * Email: * Confirm Email: * Company: Quantity: Message: Conditions:NewUsedRefurbishedNeeds RepairSecond Source (New)Second Source (Used) Part Details TEGAL 52-146-002 Manufacturer TEGAL Part Number 52-146-002 Description Status Available Approx. Qty 5 Pricing Submit RFQ to Get Prices Most Recent Supplier Data Condition Quantity Country Second Source (New) 5.0 US Other TEGAL Parts 40-395-002 Ring Ceramic 125C Castellated 46-177-001 40-768-006 Insulator Ring 37-223-008 31-406-003 WAFER SENSOR ASSY-VCE 93-229-005 RF CABLE 901E 40-374-006 46-787-002 50-079-002 40-295-003 FOCUS RING 80-202-357 O-Ring 83-288-001
