Parts For Sale TEGAL 52-146-001 TEGAL 52-146-001 Request Quote Do not fill in this field Request for Quote First Name: * Last Name: * Email: * Confirm Email: * Company: Quantity: Message: Conditions:NewUsedRefurbishedNeeds RepairSecond Source (New)Second Source (Used) Part Details TEGAL 52-146-001 Manufacturer TEGAL Part Number 52-146-001 Description Status Available Approx. Qty 6 Pricing Submit RFQ to Get Prices Most Recent Supplier Data Condition Quantity Country Second Source (New) 6.0 US Other TEGAL Parts 99-247-003 SPATULA INTERFACE 31-406-003 WAFER SENSOR ASSY-VCE 80-195-450 51-056-001 42-826-005 39-380-001 39-741-026 Tegal 903e lower electrode 40-295-003 FOCUS RING 51-178-001 37-175-001A 37-221-001 UPPER ELECT, .014 HOLE NO RAD. 80-200-121 BEARING DOOR T915 TEGAL CORPORATION
