Parts For Sale TEGAL 52-146-001 TEGAL 52-146-001 Request Quote Do not fill in this field Request for Quote First Name: * Last Name: * Email: * Confirm Email: * Company: Quantity: Message: Conditions:NewUsedRefurbishedNeeds RepairSecond Source (New)Second Source (Used) Part Details TEGAL 52-146-001 Manufacturer TEGAL Part Number 52-146-001 Description Status Available Approx. Qty 6 Pricing Submit RFQ to Get Prices Most Recent Supplier Data Condition Quantity Country Second Source (New) 6.0 US Other TEGAL Parts 46-180-001 39-680-003 ELECTRODE, CONEHEAD VENTED 51-191-001 46-786-001 40-395-001 RING, FLAT 6 46-787-002 99-138-004 PRINTED CIRCUIT BOARD TEGAL 99-138-004 TEMP MONITOR PCB 37-221-001 UPPER ELECT, .014 HOLE NO RAD. 39-665-001 200 ASHER, TEGAL PLASMALINE 200 8.5X7D METAL CHAMBER 5-8-02 83-288-001