Parts For Sale TEGAL 52-146-001 TEGAL 52-146-001 Request Quote Do not fill in this field Request for Quote First Name: * Last Name: * Email: * Confirm Email: * Company: Quantity: Message: Conditions:NewUsedRefurbishedNeeds RepairSecond Source (New)Second Source (Used) Part Details TEGAL 52-146-001 Manufacturer TEGAL Part Number 52-146-001 Description Status Available Approx. Qty 6 Pricing Submit RFQ to Get Prices Most Recent Supplier Data Condition Quantity Country Second Source (New) 6.0 US Other TEGAL Parts 33-349-004 ELECTRODE, CONDEHEAD UPPER 37-476-003 39-818-005C 37-586-003 49-060-001 57-008-001 39-733-004 Tegal 903e lower electrode 39-818-001 SLEEVE,FIBER OPTIC #39-818-001 A4T1 PAD ETCHER TEGAL 903E 50-056-001 41-177-002
