Parts For Sale TEGAL 52-146-001 TEGAL 52-146-001 Request Quote Do not fill in this field Request for Quote First Name: * Last Name: * Email: * Confirm Email: * Company: Quantity: Message: Conditions:NewUsedRefurbishedNeeds RepairSecond Source (New)Second Source (Used) Part Details TEGAL 52-146-001 Manufacturer TEGAL Part Number 52-146-001 Description Status Available Approx. Qty 6 Pricing Submit RFQ to Get Prices Most Recent Supplier Data Condition Quantity Country Second Source (New) 6.0 US Other TEGAL Parts 58-073-001 83-259-001 74-101-001 40-467-001 39-894-001 39-761-001 39-956-001 40-295-003 FOCUS RING 52-171-001 40-304-001 ELECTRODE, INSULATOR LOWER 80-202-357 O-Ring
