Parts For Sale TEGAL 52-145-002 TEGAL 52-145-002 Request Quote Do not fill in this field Request for Quote First Name: * Last Name: * Email: * Confirm Email: * Company: Quantity: Message: Conditions:NewUsedRefurbishedNeeds RepairSecond Source (New)Second Source (Used) Part Details TEGAL 52-145-002 Manufacturer TEGAL Part Number 52-145-002 Description Status Available Approx. Qty 14 Pricing Submit RFQ to Get Prices Most Recent Supplier Data Condition Quantity Country Second Source (New) 14.0 US Other TEGAL Parts 58-073-001 37-181-001 39-680-003 ELECTRODE, CONEHEAD VENTED 93-229-005 RF CABLE 901E 74-101-001 39-741-026 Tegal 903e lower electrode 39-894-001 39-956-001 50-056-001 39-680-005 ELECTRODE, UPPER VENTED HARD ANOD.
