Parts For Sale TEGAL 52-145-001 TEGAL 52-145-001 Request Quote Do not fill in this field Request for Quote First Name: * Last Name: * Email: * Confirm Email: * Company: Quantity: Message: Conditions:NewUsedRefurbishedNeeds RepairSecond Source (New)Second Source (Used) Part Details TEGAL 52-145-001 Manufacturer TEGAL Part Number 52-145-001 Description Status Available Approx. Qty 13 Pricing Submit RFQ to Get Prices Most Recent Supplier Data Condition Quantity Country Second Source (New) 13.0 US Other TEGAL Parts 58-073-001 37-181-001 74-101-001 80-095-057 PROBE TEMPERATURE 3/160D 4L SST OPM: ANALOG DEVICES P/N ... 39-894-001 39-956-001 93-123-006 BELT 37-221-003 UPPER ELECT ANOD., .021 HOLE RAD. HOLE 39-741-009 Tegal 903e lower electrode 50-056-001
