Parts For Sale TEGAL 52-145-001 TEGAL 52-145-001 Request Quote Do not fill in this field Request for Quote First Name: * Last Name: * Email: * Confirm Email: * Company: Quantity: Message: Conditions:NewUsedRefurbishedNeeds RepairSecond Source (New)Second Source (Used) Part Details TEGAL 52-145-001 Manufacturer TEGAL Part Number 52-145-001 Description Status Available Approx. Qty 13 Pricing Submit RFQ to Get Prices Most Recent Supplier Data Condition Quantity Country Second Source (New) 13.0 US Other TEGAL Parts 37-411-001 54-011-001 37-605-001 58-043-004 CR1144-00103 CR1144-00103 39-733-004 Tegal 903e lower electrode 80-200-053 CLAMP,HOSE,WORM DR,2 1/4,SST 99-249-002 PCB TEGAL END POINT DETECTOR 37-479-001B 37-221-001 UPPER ELECT, .014 HOLE NO RAD.