Parts For Sale TEGAL 52-144-001 TEGAL 52-144-001 Request Quote Do not fill in this field Request for Quote First Name: * Last Name: * Email: * Confirm Email: * Company: Quantity: Message: Conditions:NewUsedRefurbishedNeeds RepairSecond Source (New)Second Source (Used) Part Details TEGAL 52-144-001 Manufacturer TEGAL Part Number 52-144-001 Description Status Available Approx. Qty 1 Pricing Submit RFQ to Get Prices Most Recent Supplier Data Condition Quantity Country Second Source (New) 1.0 US Other TEGAL Parts 80-650-053 ACTUATOR 74-098-001 52-050-001 99-287-003 SHUTTLE INTERFACE BOARD 46-1000-001 52-167-001 58-046-001 31-388-001 CONNECTER RF CONN ASSY 31-388-001 A4T1 PAD ETCHER TEGAL 903E 37-471-001A