Parts For Sale TEGAL 52-144-001 TEGAL 52-144-001 Request Quote Do not fill in this field Request for Quote First Name: * Last Name: * Email: * Confirm Email: * Company: Quantity: Message: Conditions:NewUsedRefurbishedNeeds RepairSecond Source (New)Second Source (Used) Part Details TEGAL 52-144-001 Manufacturer TEGAL Part Number 52-144-001 Description Status Available Approx. Qty 1 Pricing Submit RFQ to Get Prices Most Recent Supplier Data Condition Quantity Country Second Source (New) 1.0 US Other TEGAL Parts 46-177-001 37-223-008 40-481-002 Insulator Ring 40-374-006 46-787-002 50-079-002 40-295-003 FOCUS RING 37-222-002 Cooling Plate 41-399-001 Tegal Part # 41-399-001 Rev.A Gasket, RF-90XE 83-288-001 80-200-144 BSHG BALL 3/8B 5/8OD 7/8L STL
