Parts For Sale TEGAL 52-144-001 TEGAL 52-144-001 Request Quote Do not fill in this field Request for Quote First Name: * Last Name: * Email: * Confirm Email: * Company: Quantity: Message: Conditions:NewUsedRefurbishedNeeds RepairSecond Source (New)Second Source (Used) Part Details TEGAL 52-144-001 Manufacturer TEGAL Part Number 52-144-001 Description Status Available Approx. Qty 1 Pricing Submit RFQ to Get Prices Most Recent Supplier Data Condition Quantity Country Second Source (New) 1.0 US Other TEGAL Parts 40-768-006 Insulator Ring 40-395-001 RING, FLAT 6 37-411-001 54-011-001 37-605-001 58-043-004 29-464-001 SPR, TEGAL KIT CHMBR GRND OEM PN equiv: 29-464-001 CR1144-00103 CR1144-00103 40-260-001 WINDOW, SAPPHIRE 1x2.5 37-479-001B 39-818-001 SLEEVE,FIBER OPTIC #39-818-001 A4T1 PAD ETCHER TEGAL 903E 39-735-004 Tegal 903e lower electrode
