Parts For Sale TEGAL 52-143-002 TEGAL 52-143-002 Request Quote Do not fill in this field Request for Quote First Name: * Last Name: * Email: * Confirm Email: * Company: Quantity: Message: Conditions:NewUsedRefurbishedNeeds RepairSecond Source (New)Second Source (Used) Part Details TEGAL 52-143-002 Manufacturer TEGAL Part Number 52-143-002 Description Status Available Approx. Qty 21 Pricing Submit RFQ to Get Prices Most Recent Supplier Data Condition Quantity Country Second Source (New) 21.0 US Other TEGAL Parts 58-073-001 37-221-002 UPPER ELECT ANOD, NON ANODIZED 39-756-003 74-101-001 99-138-004 PRINTED CIRCUIT BOARD TEGAL 99-138-004 TEMP MONITOR PCB 40-467-001 39-894-001 39-956-001 52-171-001 99-249-002 PCB TEGAL END POINT DETECTOR