Parts For Sale TEGAL 52-140-001 TEGAL 52-140-001 Request Quote Do not fill in this field Request for Quote First Name: * Last Name: * Email: * Confirm Email: * Company: Quantity: Message: Conditions:NewUsedRefurbishedNeeds RepairSecond Source (New)Second Source (Used) Part Details TEGAL 52-140-001 Manufacturer TEGAL Part Number 52-140-001 Description Status Available Approx. Qty 274 Pricing Submit RFQ to Get Prices Most Recent Supplier Data Condition Quantity Country Second Source (New) 274.0 US Other TEGAL Parts 58-073-001 40-395-003 RING 4" CASTELLATED W/ FLAT CUTAWAY 161-0040K VALVE, INLINE VACUUM 40-481-002 Insulator Ring 74-101-001 40-467-001 39-894-001 39-956-001 52-171-001 40-790-001 FOCUS RING 40-140-003 RING, INSULATOR, CERAMIC .20-99.5%
