Parts For Sale TEGAL 52-140-001 TEGAL 52-140-001 Request Quote Do not fill in this field Request for Quote First Name: * Last Name: * Email: * Confirm Email: * Company: Quantity: Message: Conditions:NewUsedRefurbishedNeeds RepairSecond Source (New)Second Source (Used) Part Details TEGAL 52-140-001 Manufacturer TEGAL Part Number 52-140-001 Description Status Available Approx. Qty 274 Pricing Submit RFQ to Get Prices Most Recent Supplier Data Condition Quantity Country Second Source (New) 274.0 US Other TEGAL Parts 58-073-001 37-181-001 33-349-004 ELECTRODE, CONDEHEAD UPPER 74-101-001 99-138-004 PRINTED CIRCUIT BOARD TEGAL 99-138-004 TEMP MONITOR PCB 39-894-001 39-956-001 37-221-003 UPPER ELECT ANOD., .021 HOLE RAD. HOLE 40-576-003-C Ring Ceramic Focus Castellated 39-818-001 SLEEVE,FIBER OPTIC #39-818-001 A4T1 PAD ETCHER TEGAL 903E 50-056-001
