Parts For Sale TEGAL 52-097-001 TEGAL 52-097-001 Request Quote Do not fill in this field Request for Quote First Name: * Last Name: * Email: * Confirm Email: * Company: Quantity: Message: Conditions:NewUsedRefurbishedNeeds RepairSecond Source (New)Second Source (Used) Part Details TEGAL 52-097-001 Manufacturer TEGAL Part Number 52-097-001 Description Status Available Approx. Qty 33 Pricing Submit RFQ to Get Prices Most Recent Supplier Data Condition Quantity Country Second Source (New) 33.0 US Other TEGAL Parts 58-073-001 37-383-004 46-810-001 40-467-001 39-894-001 29-464-001 SPR, TEGAL KIT CHMBR GRND OEM PN equiv: 29-464-001 52-171-001 40-576-003-C Ring Ceramic Focus Castellated 39-735-004 Tegal 903e lower electrode 200 ASHER, TEGAL PLASMALINE 200 8.5X7D METAL CHAMBER 5-8-02
