Parts For Sale TEGAL 52-095-001 TEGAL 52-095-001 Request Quote Do not fill in this field Request for Quote First Name: * Last Name: * Email: * Confirm Email: * Company: Quantity: Message: Conditions:NewUsedRefurbishedNeeds RepairSecond Source (New)Second Source (Used) Part Details TEGAL 52-095-001 Manufacturer TEGAL Part Number 52-095-001 Description Status Available Approx. Qty 365 Pricing Submit RFQ to Get Prices Most Recent Supplier Data Condition Quantity Country Second Source (New) 365.0 US Other TEGAL Parts 40-395-003 RING 4" CASTELLATED W/ FLAT CUTAWAY 99-247-003 SPATULA INTERFACE 31-406-003 WAFER SENSOR ASSY-VCE 40-395-001 RING, FLAT 6 37-411-001 54-011-001 37-605-001 58-043-004 29-464-001 SPR, TEGAL KIT CHMBR GRND OEM PN equiv: 29-464-001 CR1144-00103 CR1144-00103 37-479-001B 40-576-003-C Ring Ceramic Focus Castellated
