Parts For Sale TEGAL 52-089-002 TEGAL 52-089-002 Request Quote Do not fill in this field Request for Quote First Name: * Last Name: * Email: * Confirm Email: * Company: Quantity: Message: Conditions:NewUsedRefurbishedNeeds RepairSecond Source (New)Second Source (Used) Part Details TEGAL 52-089-002 Manufacturer TEGAL Part Number 52-089-002 Description Status Available Approx. Qty 28 Pricing Submit RFQ to Get Prices Most Recent Supplier Data Condition Quantity Country Second Source (New) 28.0 US Other TEGAL Parts 58-073-001 37-181-001 39-756-003 74-101-001 39-894-001 29-464-001 SPR, TEGAL KIT CHMBR GRND OEM PN equiv: 29-464-001 39-956-001 80-202-297 BELT 1/4W 115GRV 80-202-297 A4T1 PAD ETCHER TEGAL 903E 40-304-001 ELECTRODE, INSULATOR LOWER 50-056-001