Parts For Sale TEGAL 52-086-001 TEGAL 52-086-001 Request Quote Do not fill in this field Request for Quote First Name: * Last Name: * Email: * Confirm Email: * Company: Quantity: Message: Conditions:NewUsedRefurbishedNeeds RepairSecond Source (New)Second Source (Used) Part Details TEGAL 52-086-001 Manufacturer TEGAL Part Number 52-086-001 Description Status Available Approx. Qty 1 Pricing Submit RFQ to Get Prices Most Recent Supplier Data Condition Quantity Country Second Source (New) 1.0 US Other TEGAL Parts 58-073-001 33-349-004 ELECTRODE, CONDEHEAD UPPER 74-101-001 40-467-001 39-741-026 Tegal 903e lower electrode 39-894-001 39-956-001 52-171-001 40-260-001 WINDOW, SAPPHIRE 1x2.5 80-200-121 BEARING DOOR T915 TEGAL CORPORATION 80-200-144 BSHG BALL 3/8B 5/8OD 7/8L STL
