Parts For Sale TEGAL 52-086-001 TEGAL 52-086-001 Request Quote Do not fill in this field Request for Quote First Name: * Last Name: * Email: * Confirm Email: * Company: Quantity: Message: Conditions:NewUsedRefurbishedNeeds RepairSecond Source (New)Second Source (Used) Part Details TEGAL 52-086-001 Manufacturer TEGAL Part Number 52-086-001 Description Status Available Approx. Qty 1 Pricing Submit RFQ to Get Prices Most Recent Supplier Data Condition Quantity Country Second Source (New) 1.0 US Other TEGAL Parts 31-406-003 WAFER SENSOR ASSY-VCE 40-481-002 Insulator Ring 80-195-450 51-056-001 42-826-005 39-380-001 40-295-003 FOCUS RING 51-178-001 37-175-001A 80-200-121 BEARING DOOR T915 TEGAL CORPORATION
