Parts For Sale TEGAL 52-081-001 TEGAL 52-081-001 Request Quote Do not fill in this field Request for Quote First Name: * Last Name: * Email: * Confirm Email: * Company: Quantity: Message: Conditions:NewUsedRefurbishedNeeds RepairSecond Source (New)Second Source (Used) Part Details TEGAL 52-081-001 Manufacturer TEGAL Part Number 52-081-001 Description Status Available Approx. Qty 60 Pricing Submit RFQ to Get Prices Most Recent Supplier Data Condition Quantity Country Second Source (New) 60.0 US Other TEGAL Parts 58-073-001 39-741-004 ELECTRODE, LOWER 6" 37-383-004 46-810-001 40-467-001 40-140-001 RING, CERAMIC INSULATOR 39-894-001 39-761-001 52-171-001 40-576-003-C Ring Ceramic Focus Castellated
