Parts For Sale TEGAL 52-065-001 TEGAL 52-065-001 Request Quote Do not fill in this field Request for Quote First Name: * Last Name: * Email: * Confirm Email: * Company: Quantity: Message: Conditions:NewUsedRefurbishedNeeds RepairSecond Source (New)Second Source (Used) Part Details TEGAL 52-065-001 Manufacturer TEGAL Part Number 52-065-001 Description Status Available Approx. Qty 7 Pricing Submit RFQ to Get Prices Most Recent Supplier Data Condition Quantity Country Second Source (New) 7.0 US Other TEGAL Parts 40-395-003 RING 4" CASTELLATED W/ FLAT CUTAWAY 46-177-001 37-223-008 40-374-006 46-787-002 50-079-002 39-741-009 Tegal 903e lower electrode 40-260-001 WINDOW, SAPPHIRE 1x2.5 40-576-003-C Ring Ceramic Focus Castellated 39-735-004 Tegal 903e lower electrode 80-200-121 BEARING DOOR T915 TEGAL CORPORATION 83-288-001
