Parts For Sale TEGAL 52-065-001 TEGAL 52-065-001 Request Quote Do not fill in this field Request for Quote First Name: * Last Name: * Email: * Confirm Email: * Company: Quantity: Message: Conditions:NewUsedRefurbishedNeeds RepairSecond Source (New)Second Source (Used) Part Details TEGAL 52-065-001 Manufacturer TEGAL Part Number 52-065-001 Description Status Available Approx. Qty 7 Pricing Submit RFQ to Get Prices Most Recent Supplier Data Condition Quantity Country Second Source (New) 7.0 US Other TEGAL Parts 33-349-004 ELECTRODE, CONDEHEAD UPPER 39-741-004 ELECTRODE, LOWER 6" 51-251-001 51-092-001 74-124-005 46-787-003 99-138-004 PRINTED CIRCUIT BOARD TEGAL 99-138-004 TEMP MONITOR PCB 51-259-001 99-287-003 SHUTTLE INTERFACE BOARD 39-741-009 Tegal 903e lower electrode 52-175-001
