Parts For Sale TEGAL 52-065-001 TEGAL 52-065-001 Request Quote Do not fill in this field Request for Quote First Name: * Last Name: * Email: * Confirm Email: * Company: Quantity: Message: Conditions:NewUsedRefurbishedNeeds RepairSecond Source (New)Second Source (Used) Part Details TEGAL 52-065-001 Manufacturer TEGAL Part Number 52-065-001 Description Status Available Approx. Qty 7 Pricing Submit RFQ to Get Prices Most Recent Supplier Data Condition Quantity Country Second Source (New) 7.0 US Other TEGAL Parts 38-023-001 COOLING RING 46-1006-001 80-195-450 51-056-001 42-826-005 39-380-001 51-178-001 37-175-001A 37-222-002 Cooling Plate 40-140-003 RING, INSULATOR, CERAMIC .20-99.5%
