Parts For Sale TEGAL 52-065-001 TEGAL 52-065-001 Request Quote Do not fill in this field Request for Quote First Name: * Last Name: * Email: * Confirm Email: * Company: Quantity: Message: Conditions:NewUsedRefurbishedNeeds RepairSecond Source (New)Second Source (Used) Part Details TEGAL 52-065-001 Manufacturer TEGAL Part Number 52-065-001 Description Status Available Approx. Qty 7 Pricing Submit RFQ to Get Prices Most Recent Supplier Data Condition Quantity Country Second Source (New) 7.0 US Other TEGAL Parts 39-741-004 ELECTRODE, LOWER 6" 31-406-003 WAFER SENSOR ASSY-VCE 39-756-003 74-098-001 52-089-001 52-050-001 52-167-001 99-249-002 PCB TEGAL END POINT DETECTOR 58-046-001 37-471-001A