Parts For Sale TEGAL 52-059-001 TEGAL 52-059-001 Request Quote Do not fill in this field Request for Quote First Name: * Last Name: * Email: * Confirm Email: * Company: Quantity: Message: Conditions:NewUsedRefurbishedNeeds RepairSecond Source (New)Second Source (Used) Part Details TEGAL 52-059-001 Manufacturer TEGAL Part Number 52-059-001 Description Status Available Approx. Qty 25 Pricing Submit RFQ to Get Prices Most Recent Supplier Data Condition Quantity Country Second Source (New) 25.0 US Other TEGAL Parts 58-073-001 40-768-004 Insulator Ring 39-853-005 46-1006-001 74-101-001 40-467-001 39-894-001 29-464-001 SPR, TEGAL KIT CHMBR GRND OEM PN equiv: 29-464-001 39-956-001 39-733-004 Tegal 903e lower electrode 52-171-001 40-140-003 RING, INSULATOR, CERAMIC .20-99.5%
