Parts For Sale TEGAL 52-058-001 TEGAL 52-058-001 Request Quote Do not fill in this field Request for Quote First Name: * Last Name: * Email: * Confirm Email: * Company: Quantity: Message: Conditions:NewUsedRefurbishedNeeds RepairSecond Source (New)Second Source (Used) Part Details TEGAL 52-058-001 Manufacturer TEGAL Part Number 52-058-001 Description Status Available Approx. Qty 100 Pricing Submit RFQ to Get Prices Most Recent Supplier Data Condition Quantity Country Second Source (New) 100.0 US Other TEGAL Parts 58-073-001 37-383-004 93-229-005 RF CABLE 901E 46-810-001 40-467-001 39-741-026 Tegal 903e lower electrode 39-894-001 29-464-001 SPR, TEGAL KIT CHMBR GRND OEM PN equiv: 29-464-001 52-171-001 37-222-002 Cooling Plate 39-735-004 Tegal 903e lower electrode 150 mm 150 mm 25 slot Aluminum wafer carrier.