Parts For Sale TEGAL 52-057-002 TEGAL 52-057-002 Request Quote Do not fill in this field Request for Quote First Name: * Last Name: * Email: * Confirm Email: * Company: Quantity: Message: Conditions:NewUsedRefurbishedNeeds RepairSecond Source (New)Second Source (Used) Part Details TEGAL 52-057-002 Manufacturer TEGAL Part Number 52-057-002 Description Status Available Approx. Qty 53 Pricing Submit RFQ to Get Prices Most Recent Supplier Data Condition Quantity Country Second Source (New) 53.0 US Other TEGAL Parts 150 mm 150 mm 25 slot Aluminum wafer carrier. 58-073-001 74-101-001 40-467-001 39-894-001 39-761-001 39-956-001 52-171-001 80-202-297 BELT 1/4W 115GRV 80-202-297 A4T1 PAD ETCHER TEGAL 903E