Parts For Sale TEGAL 52-057-001 TEGAL 52-057-001 Request Quote Do not fill in this field Request for Quote First Name: * Last Name: * Email: * Confirm Email: * Company: Quantity: Message: Conditions:NewUsedRefurbishedNeeds RepairSecond Source (New)Second Source (Used) Part Details TEGAL 52-057-001 Manufacturer TEGAL Part Number 52-057-001 Description Status Available Approx. Qty 57 Pricing Submit RFQ to Get Prices Most Recent Supplier Data Condition Quantity Country Second Source (New) 57.0 US Other TEGAL Parts 58-073-001 46-1006-001 74-101-001 99-138-004 PRINTED CIRCUIT BOARD TEGAL 99-138-004 TEMP MONITOR PCB 40-467-001 39-894-001 39-956-001 40-295-003 FOCUS RING 52-171-001 99-249-002 PCB TEGAL END POINT DETECTOR 41-399-001 Tegal Part # 41-399-001 Rev.A Gasket, RF-90XE 39-680-005 ELECTRODE, UPPER VENTED HARD ANOD.
