Parts For Sale TEGAL 52-055-002 TEGAL 52-055-002 Request Quote Do not fill in this field Request for Quote First Name: * Last Name: * Email: * Confirm Email: * Company: Quantity: Message: Conditions:NewUsedRefurbishedNeeds RepairSecond Source (New)Second Source (Used) Part Details TEGAL 52-055-002 Manufacturer TEGAL Part Number 52-055-002 Description Status Available Approx. Qty 5 Pricing Submit RFQ to Get Prices Most Recent Supplier Data Condition Quantity Country Second Source (New) 5.0 US Other TEGAL Parts 38-023-001 COOLING RING 51-191-001 46-786-001 46-787-002 40-140-001 RING, CERAMIC INSULATOR 40-790-001 FOCUS RING 40-304-001 ELECTRODE, INSULATOR LOWER 52-059-001 37-221-001 UPPER ELECT, .014 HOLE NO RAD. 39-665-001 83-288-001