Parts For Sale TEGAL 52-048-001 TEGAL 52-048-001 Request Quote Do not fill in this field Request for Quote First Name: * Last Name: * Email: * Confirm Email: * Company: Quantity: Message: Conditions:NewUsedRefurbishedNeeds RepairSecond Source (New)Second Source (Used) Part Details TEGAL 52-048-001 Manufacturer TEGAL Part Number 52-048-001 Description Status Available Approx. Qty 20 Pricing Submit RFQ to Get Prices Most Recent Supplier Data Condition Quantity Country Second Source (New) 20.0 US Other TEGAL Parts 150 mm 150 mm 25 slot Aluminum wafer carrier. 58-073-001 40-768-004 Insulator Ring 83-259-001 74-101-001 40-467-001 39-894-001 39-956-001 52-171-001 39-735-004 Tegal 903e lower electrode
