Parts For Sale TEGAL 52-047-002 TEGAL 52-047-002 Request Quote Do not fill in this field Request for Quote First Name: * Last Name: * Email: * Confirm Email: * Company: Quantity: Message: Conditions:NewUsedRefurbishedNeeds RepairSecond Source (New)Second Source (Used) Part Details TEGAL 52-047-002 Manufacturer TEGAL Part Number 52-047-002 Description Status Available Approx. Qty 20 Pricing Submit RFQ to Get Prices Most Recent Supplier Data Condition Quantity Country Second Source (New) 20.0 US Other TEGAL Parts 37-383-004 80-650-053 ACTUATOR 83-259-001 40-395-001 RING, FLAT 6 46-810-001 99-138-004 PRINTED CIRCUIT BOARD TEGAL 99-138-004 TEMP MONITOR PCB 40-467-001 39-894-001 39-832-001 37-221-003 UPPER ELECT ANOD., .021 HOLE RAD. HOLE 52-171-001 80-202-297 BELT 1/4W 115GRV 80-202-297 A4T1 PAD ETCHER TEGAL 903E