Parts For Sale TEGAL 52-046-001 TEGAL 52-046-001 Request Quote Do not fill in this field Request for Quote First Name: * Last Name: * Email: * Confirm Email: * Company: Quantity: Message: Conditions:NewUsedRefurbishedNeeds RepairSecond Source (New)Second Source (Used) Part Details TEGAL 52-046-001 Manufacturer TEGAL Part Number 52-046-001 Description Status Available Approx. Qty 30 Pricing Submit RFQ to Get Prices Most Recent Supplier Data Condition Quantity Country Second Source (New) 30.0 US Other TEGAL Parts 37-411-001 54-011-001 99-138-004 PRINTED CIRCUIT BOARD TEGAL 99-138-004 TEMP MONITOR PCB 37-605-001 58-043-004 CR1144-00103 CR1144-00103 39-741-009 Tegal 903e lower electrode 37-479-001B 50-056-001 39-680-005 ELECTRODE, UPPER VENTED HARD ANOD. 80-200-144 BSHG BALL 3/8B 5/8OD 7/8L STL