Parts For Sale TEGAL 52-046-001 TEGAL 52-046-001 Request Quote Do not fill in this field Request for Quote First Name: * Last Name: * Email: * Confirm Email: * Company: Quantity: Message: Conditions:NewUsedRefurbishedNeeds RepairSecond Source (New)Second Source (Used) Part Details TEGAL 52-046-001 Manufacturer TEGAL Part Number 52-046-001 Description Status Available Approx. Qty 30 Pricing Submit RFQ to Get Prices Most Recent Supplier Data Condition Quantity Country Second Source (New) 30.0 US Other TEGAL Parts 58-073-001 39-741-004 ELECTRODE, LOWER 6" 46-810-001 40-467-001 39-894-001 52-171-001 52-047-002 37-221-001 UPPER ELECT, .014 HOLE NO RAD. 150 mm 150 mm 25 slot Aluminum wafer carrier.
