Parts For Sale TEGAL 52-010-001 TEGAL 52-010-001 Request Quote Do not fill in this field Request for Quote First Name: * Last Name: * Email: * Confirm Email: * Company: Quantity: Message: Conditions:NewUsedRefurbishedNeeds RepairSecond Source (New)Second Source (Used) Part Details TEGAL 52-010-001 Manufacturer TEGAL Part Number 52-010-001 Description Status Available Approx. Qty 8 Pricing Submit RFQ to Get Prices Most Recent Supplier Data Condition Quantity Country Second Source (New) 8.0 US Other TEGAL Parts 40-395-002 Ring Ceramic 125C Castellated 40-395-003 RING 4" CASTELLATED W/ FLAT CUTAWAY 99-138-004 PRINTED CIRCUIT BOARD TEGAL 99-138-004 TEMP MONITOR PCB 74-098-001 52-050-001 52-041-001 52-167-001 58-046-001 31-388-001 CONNECTER RF CONN ASSY 31-388-001 A4T1 PAD ETCHER TEGAL 903E 37-471-001A