Parts For Sale TEGAL 52-010-001 TEGAL 52-010-001 Request Quote Do not fill in this field Request for Quote First Name: * Last Name: * Email: * Confirm Email: * Company: Quantity: Message: Conditions:NewUsedRefurbishedNeeds RepairSecond Source (New)Second Source (Used) Part Details TEGAL 52-010-001 Manufacturer TEGAL Part Number 52-010-001 Description Status Available Approx. Qty 8 Pricing Submit RFQ to Get Prices Most Recent Supplier Data Condition Quantity Country Second Source (New) 8.0 US Other TEGAL Parts 37-411-001 54-011-001 37-605-001 40-140-001 RING, CERAMIC INSULATOR 80-095-057 PROBE TEMPERATURE 3/160D 4L SST OPM: ANALOG DEVICES P/N ... 58-043-004 29-464-001 SPR, TEGAL KIT CHMBR GRND OEM PN equiv: 29-464-001 CR1144-00103 CR1144-00103 99-249-002 PCB TEGAL END POINT DETECTOR 37-479-001B 80-200-144 BSHG BALL 3/8B 5/8OD 7/8L STL