Parts For Sale TEGAL 52-010-001 TEGAL 52-010-001 Request Quote Do not fill in this field Request for Quote First Name: * Last Name: * Email: * Confirm Email: * Company: Quantity: Message: Conditions:NewUsedRefurbishedNeeds RepairSecond Source (New)Second Source (Used) Part Details TEGAL 52-010-001 Manufacturer TEGAL Part Number 52-010-001 Description Status Available Approx. Qty 8 Pricing Submit RFQ to Get Prices Most Recent Supplier Data Condition Quantity Country Second Source (New) 8.0 US Other TEGAL Parts 51-251-001 51-092-001 74-124-005 83-259-001 40-395-001 RING, FLAT 6 46-787-003 51-259-001 50-056-001 52-175-001 150 mm 150 mm 25 slot Aluminum wafer carrier.
