Parts For Sale TEGAL 52-010-001 TEGAL 52-010-001 Request Quote Do not fill in this field Request for Quote First Name: * Last Name: * Email: * Confirm Email: * Company: Quantity: Message: Conditions:NewUsedRefurbishedNeeds RepairSecond Source (New)Second Source (Used) Part Details TEGAL 52-010-001 Manufacturer TEGAL Part Number 52-010-001 Description Status Available Approx. Qty 8 Pricing Submit RFQ to Get Prices Most Recent Supplier Data Condition Quantity Country Second Source (New) 8.0 US Other TEGAL Parts 80-195-450 51-056-001 42-826-005 39-380-001 40-295-003 FOCUS RING 51-178-001 99-249-002 PCB TEGAL END POINT DETECTOR 37-175-001A 37-221-001 UPPER ELECT, .014 HOLE NO RAD. 50-056-001 200 ASHER, TEGAL PLASMALINE 200 8.5X7D METAL CHAMBER 5-8-02